【問題】Stepper scanner ?推薦回答
關於「Stepper scanner」標籤,搜尋引擎有相關的訊息討論:
找ASML scanner相關社群貼文資訊。
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Sendai Nikon Precision Corporation is merged with Miyagi Nikon Precision Co., Ltd. NES1-h04 mini stepper. 2011. NSR-S320F (resolution ≦ 65 nm), dry ArF scanner ...: 。
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常見Stepper scanner問答
延伸文章資訊曝光系统. •. 显影系统. •. 检测系统. •. 总结黄光制程 ... 光阻是一种化学材料,在PHOTO process 中经过曝光 ... 曝光机的种类(Scanner ,Stepper)...
步進重複投影曝光(Stepping-repeating Project Printing或稱作Stepper)。80年代末~90年代,0.35μm(I line)~0.25μm(DUV)。掩膜板...
光阻涂布 · 曝光(光刻) · 无光罩雷射直写曝光机 · 光罩 · 显影 · 蚀刻机 · 清洗 · 真空干燥机(VCD) · Nikon Stepper 步进曝光机 · Ultratech st...
曝光系统. •. 显影系统. •. 检测系统. •. 总结黄光制程 ... 光阻是一种化学材料,在PHOTO process 中经过曝光 ... 曝光机的种类(Scanner ,Stepper)...
步進重複投影曝光(Stepping-repeating Project Printing或稱作Stepper)。80年代末~90年代,0.35μm(I line)~0.25μm(DUV)。掩膜板...
光阻涂布 · 曝光(光刻) · 无光罩雷射直写曝光机 · 光罩 · 显影 · 蚀刻机 · 清洗 · 真空干燥机(VCD) · Nikon Stepper 步进曝光机 · Ultratech st...